Gas Plasma Reactor, Laboratory Equipment
PR500-115V/PR500-220V/PR510- PR Series Compact Gas Plasma Asher – Yamato
$59,746.50 – $78,284.80
Compact, barrel type low temperature ashing device designed with a large chamber made of quartz considered almost completely resistant against most plasma processes
Features
- Compact, space saving design with oscillation section integrated with a portion of the chamber
- Outstanding operability and safety with the automatic tuning system as standand component
- Equipped with a large quartz chamber (ø215mm) which can process big testing sampless
Applications
- Removal of photoresist
- Cleaning of parts
- Surfactant treatment
- Micro polishing
- Corresponds to wafer and glass substrate
| Models | PR500-115V PR500-220V (FLOW METER) |
PR510 (MASS FLOW METER) |
|
| Method | Barrel type chamber direct plasma | Barrel type chamber direct plasma | |
| High Frequency Output | Max. 500W | Max. 500W | |
| Oscillating Frequency | 13.56MHz | ||
| Tuning Method | Automatic tuning | Automatic tuning | |
| Reaction Chamber | Made of quartz, ø215×305mm | Made of quartz, ø215×305mm | |
| Reaction Gas | Dual system (O₂ / CF₄) | ||
| Control System | Manual | Automatic touch panel | |
| Piping Material | Stainless steel, Teflon | Stainless steel, Teflon | |
| External Dimensions W×D×H | 438×520×760 mm | 520×630×760 mm | |
| Weight | ~60kg | ~60kg | |
| Power Source 50/60Hz | AC115V 7.8A AC220V 4.1A |
AC220V 7.3A Three-phase |
|
| Standard Accessories | Connection table (1 complete set), vacuum grease (1 pc.), o-ring for reaction chamber (1 pc.) | ||
| Weight | N/A |
|---|---|
| Dimensions | N/A |
| Products | PR-500-115V (GAS PLASMA REACTOR 115V), PR-500-220V (GAS PLASMA REACTOR 220V), PR-510 GAS (PLASMA REACTOR 220V 3-PHASE) |
